Journal
VACUUM
Volume 189, Issue -, Pages -Publisher
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.vacuum.2021.110250
Keywords
Magnetron sputtering; Tantalum coating; Multilayer; Bias voltage
Funding
- Chongqing Technology Innovation and Application Development Project [cstc2019jscx-fxydX0046]
- Scientific and Technological Research Program of Chongqing Municipal Education Commission [KJ1601104, KJQN201901340, KJQN202001303]
- Chongqing Research Program of Basic Research and Frontier Technology [cstc2019jcyj-msxmX0874, cstc2018jcyjyszxX0003]
- Foundation of Chongqing University of Arts and Sciences [Y2018CL36]
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Ta coatings were prepared on medical titanium alloy to improve wear resistance, and their phase structure and properties were studied under different preparation conditions. Multi-layer coatings showed a non-columnar feature, while pure phase columnar crystals were found in monolayer coatings. Among the coatings, the one prepared under direct current bias voltage exhibited the best adhesion and wear resistance.
To improve the wear resistance of medical titanium alloy, Ta coatings were prepared by magnetron sputtering method on Ti6Al4V substrates. Phase structure and surface morphology of Ta coatings were characterized by Xray diffraction and atomic force microscope, respectively. The properties of Ta coatings, including adhesion, nano-hardness, and wear resistance, were tested using nano-scratch, nano-indentation and tribometer, respectively. The results show that both stable body-centered cubic (alpha-Ta) phase and metastable tetragonal phase (8-Ta) coexist in a multi-layer structure, and it shows a non-columnar feature. Interestingly, only a pure phase with columnar crystals is found in monolayer Ta coating. A body-centered cubic (alpha-Ta) phase is found in a monolayer prepared under the pulse power bias voltage with low deposition temperature. A pure metastable tetragonal phase (8-Ta) is prepared under the direct current bias voltage, which has the best adhesion and wear resistance compared with other Ta coatings.
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