4.6 Article

Variable angle spectroscopic ellipsometry characterization of spin-coated MoS2 films

Journal

VACUUM
Volume 189, Issue -, Pages -

Publisher

PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.vacuum.2021.110232

Keywords

Ellipsometry; Micro-Raman spectroscopy; Molybdenum disulfide; Optical properties

Funding

  1. POR CALABRIA [FESR-FSE 2014-2020 -ASSE I -]

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Molybdenum disulfide (MoS2) among Transition Metal Dichalcogenides (TMDCs) has sparked interest due to its potential applications, particularly in solution-based applications. However, lack of knowledge about its optical properties has hindered its use. This study investigated the broadband optical properties of MoS2 films deposited by spin-coating on Si/SiO2 substrates using micro-Raman spectroscopy and Variable Angle Spectroscopic Ellipsometry (VASE).
Amongst emerging Transition Metal Dichalcogenides (TMDCs), molybdenum disulfide (MoS2) has attracted a remarkable interest thanks to many possible applications. In particular, MoS2 has potentialities not yet fully realized in solution-based applications. However, the lack of knowledge of the optical properties of MoS2 has significantly limited its use in many exciting photonic fields. Films prepared by solution-based exfoliation methods have never been studied to our best knowledge. The optical properties of MoS2 films prepared by solution-based exfoliation methods have never been studied to our best knowledge. Herein, the broadband optical properties of similar to 20 nm-thick MoS2 films deposited by spin-coating onto Si/SiO2 substrates were studied by means of micro-Raman spectroscopy and Variable Angle Spectroscopic Ellipsometry (VASE).

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