Journal
ULTRAMICROSCOPY
Volume 226, Issue -, Pages -Publisher
ELSEVIER
DOI: 10.1016/j.ultramic.2021.113293
Keywords
Scanning electron microscopy; Lateral standards; Calibration; Magnification; Field distortion; Metrological atomic force microscopy
Categories
Funding
- National Key Research and Development Program of China [2019YFF0216401, 2016YFA0200902]
- EMPIR programme
- European Union's Horizon 2020 research and innovation programme
Ask authors/readers for more resources
This paper introduces a new type of grating sample for calibrating magnification and nonlinearity of SEM, showing outstanding pattern uniformity and high accuracy. The research demonstrates that the new sample outperforms conventional samples and meets the high accuracy requirements of modern nanoelectronics devices and systems.
Calibration of magnification and nonlinearity of scanning electron microscopy (SEM) is an essential task. In this paper, we proposed a new type of 1D grating sample fabricated by combining laser-focused atomic deposition and x-ray interference lithography as a lateral standard for calibrating SEMs. The calibrations of the grating pattern by a metrological large-range atomic force microscope indicate that the grating sample exhibits outstanding pattern uniformity that surpasses conventional samples fabricated by e-beam lithography: (1) the nonlinear deviation of the grating structures is below +/- 0.5 nm over a measurement range of 5 mu m; (2) the maximal variation of the calibrated mean pitch values is lower than 0.01 nm at different locations randomly selected all over the pattern area. The proposed new sample is applied for accurately calibrating the magnification and nonlinearity of a commercial SEM, showing its advantages of easy-of-use and high accuracy. The influence of the defocus level of SEM on the calibration result is also demonstrated. This research offers a feasible solution for highly accurate SEM calibration needed for 3D nanometrology and hybrid metrology demanded in metrology of modern nanoelectronics devices and systems.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available