Journal
SUPERLATTICES AND MICROSTRUCTURES
Volume 156, Issue -, Pages -Publisher
ACADEMIC PRESS LTD- ELSEVIER SCIENCE LTD
DOI: 10.1016/j.spmi.2021.106986
Keywords
AlGaN; GaN Schottky Barrier diode; Recessed anode; p-GaN buried layer; p-GaN cap layer; Baliga's FOM
Categories
Funding
- National Key Research and Development Program [2017YFB0403000]
- science and technology program of Ningbo [2019B10129]
- Open Project of Key Laboratory of Microelectronic Devices and Integrated Technology, Institute of Microelectronics [202006]
- Fundamental Research Funds for the Central Universities [JB181110]
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This article proposes and optimizes a recessed-anode AlGaN/GaN Schottky barrier diode with a p-GaN cap layer and an anode-connected p-GaN buried layer. By studying the trade-off between different structural parameters, the performance of the device is improved.
In this article, a recessed-anode AlGaN/GaN Schottky barrier diode with a p-GaN cap layer and an anode-connected p-GaN buried layer was proposed and optimized by Silvaco TCAD. The impact of different structural parameters on the trade-off between breakdown voltage and differential specific on-resistance were systematically investigated. Compared with the conventional recessed-anode SBD, the introduction of a p-GaN buried layer with an optimum distance from 2DEG channel can improve the breakdown voltage mildly, reduce the on-resistance and increase the surge current capability obviously at relatively high forward bias. Besides, a p-GaN cap layers slightly decreases the current density but demonstrates an obvious improvement in the breakdown voltage. Therefore, a combining of the p-GaN buried layer and the p-GaN cap layer is promising to achieve the better trade-off between on-resistance and breakdown voltage, resulting in a higher Baliga's FOM.
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