Tailoring properties of indium tin oxide thin films for their work in both electrochemical and optical label-free sensing systems

This work is devoted to the identification properties of indium tin oxide (ITO) thin films responsible for their possible application in combined optical and electrochemical label-free sensing systems offering enhanced functionalities. Since any post-processing would make it difficult to identify direct relation between deposition parameters and properties of the ITO films, especially when deposition on temperature-sensitive substrates is considered, the films were deposited using reactive high power impulse magnetron sputtering (HiPIMS) at low temperature and with no post-deposition annealing. We focused mainly on the impact of reactive gases, such as oxygen or nitrogen introduced to the process chamber, on control over plasma parameters and subsequently properties of the films. The properties of the films were investigated using X-ray diffractometry, spectroscopic ellipsometry, four-point probe, and cyclic voltammetry. For presenting optical sensing capabilities, the tailored ITO films in addition to silicon and glass wafers were also deposited on the core of optical fibers to induce the lossy-mode resonance (LMR) phenomenon. The existence of specific deposition conditions resulting in ITO film properties offering both high-quality electrochemical and LMR responses has been experimentally proven. It has been found that the crystalline structure of ITO plays a key role in the determination of both the sensing capabilities. Finally, label-free sensing of antibody-antibody interactions in both optical and electrochemical domains for the sensor with tailored ITO film has been shown.

Automated summary

This study focuses on the identification properties of indium tin oxide (ITO) thin films for potential application in optical and electrochemical label-free sensing systems. Reactive high power impulse magnetron sputtering (HiPIMS) was used to deposit the films at low temperature without post-deposition annealing, with a focus on the impact of reactive gases on plasma control and film properties. The tailored ITO films demonstrated high-quality electrochemical and LMR responses, with the crystalline structure of ITO playing a key role in sensing capabilities.