High-sensitivity lollipop-shaped cilia sensor for ocean turbulence measurement

A lollipop-shaped cilia sensor based on the MEMS vector hydrophone was designed for measuring ocean turbulence. The micro-cross beam structure met successfully detected the ocean turbulence vector. In addition, the cilia were designed in a lollipop shape, which not only increased the turbulence signal receiving area but also achieved better diversion effects. In general, the turbulence signal is usually concentrated in the range 0-200 Hz. The sensor structure was simulated and analyzed and its size was optimized. The frequency response bandwidth was also ensured, leading to improved sensitivity. The results of sensor calibration experiments prove that the lollipop-type cilia sensor has high sensitivity, reaching 2.73x10(-2) Vms(2)/kg. In addition, the vector test results verify that the MEMS turbulence sensor accurately measured the two-dimensional ocean turbulence. (C) 2021 Elsevier B.V. All rights reserved.

Automated summary

A lollipop-shaped cilia sensor based on MEMS technology was designed to measure ocean turbulence, successfully detecting turbulence signals in the 0-200 Hz range. The sensor structure improved sensitivity and signal receiving area, with calibration experiments showing high sensitivity and accurate measurement of two-dimensional ocean turbulence.