Journal
SCRIPTA MATERIALIA
Volume 201, Issue -, Pages -Publisher
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.scriptamat.2021.113951
Keywords
Superlattice films; Orientation; Coherent thickness; Hardness; Stacking faults
Categories
Funding
- National Natural Science Foundation of China [51922002, 51771025, 52001022]
- Fundamental Research Funds for the Central Universities [FRF-TP-17-19-003C1Z]
- China Postdoctoral Science Foundation [2019M66018, BX20190034]
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By adjusting the orientation of the entire superlattice films under the same deposition parameters, it was observed that AlN has a thicker coherent thickness in the <110>-oriented TiN/AlN superlattice film, leading to a higher hardness peak value of around 38.6GPa. This work provides a new implementation method to improve the mechanical properties of superlattice films.
Superlattice structure can significantly improve the hardness of the films without damaging the toughness. However, in TiN/AlN superlattice structure, the thickness of metastable c-AlN has a certain limit, which limits the improvement of hardness. We adjusted the orientation of the entire superlattice films under the same deposition parameters and observed that AlN has a thicker coherent thickness in the < 110 >-oriented TiN/AlN superlattice film relative to the < 100 > orientation through HRTEM, and the superlattice film reached a higher hardness peak value (similar to 38.6GPa) at the same time. This work provides a new implementation method to improve the mechanical properties of superlattice films. (C) 2021 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
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