4.8 Article

Laser soliton microcombs heterogeneously integrated on silicon

Journal

SCIENCE
Volume 373, Issue 6550, Pages 99-+

Publisher

AMER ASSOC ADVANCEMENT SCIENCE
DOI: 10.1126/science.abh2076

Keywords

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Funding

  1. Defense Advanced Research Projects Agency (DARPA) under DODOS programs of the Microsystems Technology Office (MTO) [HR0011-15-C-055]
  2. Air Force Office of Scientific Research [FA8655-20-1-7009]
  3. Swiss National Science Foundation [176563]
  4. EUs H2020 research and innovation program under the Marie Sklodowska-Curie IF grant [846737]
  5. Marie Curie Actions (MSCA) [846737] Funding Source: Marie Curie Actions (MSCA)

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Silicon photonics enables integration of optical functionalities on chip, and our approach of heterogeneously integrated laser soliton microcombs provides a route for large-volume, low-cost manufacturing of chip-based frequency combs. These devices can output single-soliton microcombs with a 100-gigahertz repetition rate and offer laser frequency noise reduction, showing potential for next-generation high-capacity transceivers, data centers, and mobile platforms.
Silicon photonics enables wafer-scale integration of optical functionalities on chip. Silicon-based laser frequency combs can provide integrated sources of mutually coherent laser lines for terabit-per-second transceivers, parallel coherent light detection and ranging, or photonics-assisted signal processing. We report heterogeneously integrated laser soliton microcombs combining both indium phospide/silicon (InP/Si) semiconductor lasers and ultralow-loss silicon nitride (Si3N4) microresonators on a monolithic silicon substrate. Thousands of devices can be produced from a single wafer by using complementary metal-oxide-semiconductor-compatible techniques. With on-chip electrical control of the laser-microresonator relative optical phase, these devices can output single-soliton microcombs with a 100-gigahertz repetition rate. Furthermore, we observe laser frequency noise reduction due to self-injection locking of the InP/Si laser to the Si3N4 microresonator. Our approach provides a route for large-volume, low-cost manufacturing of narrow-linewidth, chip-based frequency combs for next-generation high-capacity transceivers, data centers, space and mobile platforms.

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