Journal
PLASMA SCIENCE & TECHNOLOGY
Volume 24, Issue 3, Pages -Publisher
IOP Publishing Ltd
DOI: 10.1088/2058-6272/ac1d9b
Keywords
helicon plasma; magnetized plasma; double layer; diverging magnetic field; electrostatic probe; OES
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Funding
- National Natural Science Foundation of China [11975047]
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This paper compares the characteristics of an electric double layer (DL) in argon helicon plasma and magnetized direct current (DC) discharge plasma. Experimental investigations show that the DL appears in a divergent magnetic field with high plasma density. The strength of the DL increases with the magnetic field and can be controlled by the magnetic field structure and discharge mode.
We present in this paper the comparison of an electric double layer (DL) in argon helicon plasma and magnetized direct current (DC) discharge plasma. DL in high-density argon helicon plasma of 13.56 MHz RF discharge was investigated experimentally by a floating electrostatic probe and local optical emission spectroscopy (LOES). The DL characteristics at different operating parameters, including RF power (300-1500 W), tube diameter (8-60 mm), and external magnetic field (0-300 G), were measured. For comparison, DL in magnetized plasma channel of a DC discharge under different conditions was also measured experimentally. The results show that in both cases, DL appears in a divergent magnetic field where the magnetic field gradient is the largest and when the plasma density is sufficiently high. DL strength (or potential drop of DL) increases with the magnetic field in two different structures. It is suggested that the electric DL should be a common phenomenon in dense plasma under a gradient external magnetic field. DL in magnetized plasmas can be controlled properly by magnetic field structure and discharge mode (hence the plasma density).
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