Related references
Note: Only part of the references are listed.Changes in surface properties of PI/WO2 coatings after vacuum ultraviolet irradiation
N. I. Cherkashina et al.
JOURNAL OF PHOTOCHEMISTRY AND PHOTOBIOLOGY A-CHEMISTRY (2021)
Absolute radiometric calibration of a VUV spectrometer in the wavelength range 46-300 nm
C. Froehler-Bachus et al.
JOURNAL OF QUANTITATIVE SPECTROSCOPY & RADIATIVE TRANSFER (2021)
Polymeric nanowrinkles: surface modification of polypropylene films in the VUV energy range
Lays B. Fitaroni et al.
JOURNAL OF MATERIALS SCIENCE (2021)
Ultraviolet/vacuum-ultraviolet emission from a high power magnetron sputtering plasma with an aluminum target
E. J. Iglesias et al.
JOURNAL OF PHYSICS D-APPLIED PHYSICS (2020)
Vacuum-UV of polyetheretherketone (PEEK) as a surface pre-treatment for structural adhesive bonding
Elisa Arikan et al.
JOURNAL OF ADHESION (2020)
Vacuum ultraviolet spectroscopy of cold atmospheric pressure plasma jets
Judith Golda et al.
PLASMA PROCESSES AND POLYMERS (2020)
Atmospheric plasma VUV photon emission
F. Liu et al.
PLASMA SOURCES SCIENCE & TECHNOLOGY (2020)
VUV radiation flux from argon DC magnetron plasma
A. F. Pal et al.
JOURNAL OF PHYSICS D-APPLIED PHYSICS (2020)
Effect of VUV Radiation on Surface Modification of Polystyrene Exposed to Atmospheric Pressure Plasma Jet
Rok Zaplotnik et al.
POLYMERS (2020)
Utilizing photosensitive polymers to evaluate UV radiation exposures in different plasma chamber configurations
Luxherta Buzi et al.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A (2020)
Effect of VUV radiation and reactive hydrogen atoms on depletion of fluorine from polytetrafluoroethylene surface
Dane Lojen et al.
APPLIED SURFACE SCIENCE (2020)
Impact of VUV photons on SiO2 and organosilicate low-k dielectrics: General behavior, practical applications, and atomic models
M. R. Baklanov et al.
APPLIED PHYSICS REVIEWS (2019)
Effects of irradiation atmosphere on vacuum ultraviolet-induced surface modification of cyclo-olefin polymer substrates
Young-Jong Kim et al.
APPLIED PHYSICS EXPRESS (2019)
Polyethylene terephthalate (PET) surface modification by VUV and neutral active species in remote oxygen or hydrogen plasmas
Yan Zhang et al.
PLASMA PROCESSES AND POLYMERS (2019)
VUV Spectral Irradiance Measurements in H2/He/Ar Microwave Plasmas and Comparison with Solar Data
Et-touhami Es-sebbar et al.
ASTROPHYSICAL JOURNAL SUPPLEMENT SERIES (2019)
In situ measurement of VUV/UV radiation from low-pressure microwave-produced plasma in Ar/O2 gas mixtures
E. J. Iglesias et al.
MEASUREMENT SCIENCE AND TECHNOLOGY (2017)
Multifold study of volume plasma chemistry in Ar/CF4 and Ar/CHF3 CCP discharges
O. V. Proshina et al.
PLASMA SOURCES SCIENCE & TECHNOLOGY (2017)
Controlling VUV photon fluxes in pulsed inductively coupled Ar/Cl2 plasmas and potential applications in plasma etching
Peng Tian et al.
PLASMA SOURCES SCIENCE & TECHNOLOGY (2017)
A microwave plasma source for VUV atmospheric photochemistry
S. Tigrine et al.
JOURNAL OF PHYSICS D-APPLIED PHYSICS (2016)
Quantification of the VUV radiation in low pressure hydrogen and nitrogen plasmas
U. Fantz et al.
PLASMA SOURCES SCIENCE & TECHNOLOGY (2016)
Comparison of vacuum ultra-violet emission of Ar/CF4 and Ar/CF3I capacitively coupled plasmas
A. Zotovich et al.
PLASMA SOURCES SCIENCE & TECHNOLOGY (2016)
Vacuum ultra-violet damage and damage mitigation for plasma processing of highly porous organosilicate glass dielectrics
J. -F. de Marneffe et al.
JOURNAL OF APPLIED PHYSICS (2015)
Comparison of surface vacuum ultraviolet emissions with resonance level number densities. II. Rare-gas plasmas and Ar-molecular gas mixtures
John B. Boffard et al.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A (2015)
Controlling VUV photon fluxes in low-pressure inductively coupled plasmas
Peng Tian et al.
PLASMA SOURCES SCIENCE & TECHNOLOGY (2015)
OPTIMIZATION OF A SOLAR SIMULATOR FOR PLANETARY-PHOTOCHEMICAL STUDIES
Et-touhami Es-sebbar et al.
ASTROPHYSICAL JOURNAL SUPPLEMENT SERIES (2015)
Nanosecond, repetitively pulsed microdischarge vacuum ultraviolet source
J. Stephens et al.
APPLIED PHYSICS LETTERS (2014)
Low-k films modification under EUV and VUV radiation
T. V. Rakhimova et al.
JOURNAL OF PHYSICS D-APPLIED PHYSICS (2014)
Comparison of surface vacuum ultraviolet emissions with resonance level number densities. I. Argon plasmas
John B. Boffard et al.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A (2014)
Evaluation of Absolute Flux of Vacuum Ultraviolet Photons in an Electron Cyclotron Resonance Hydrogen Plasma: Comparison with Ion Flux
Kazunori Zaima et al.
JAPANESE JOURNAL OF APPLIED PHYSICS (2013)
The effects of vacuum ultraviolet radiation on low-k dielectric films
H. Sinha et al.
JOURNAL OF APPLIED PHYSICS (2012)
Ultraviolet excimer radiation from nonequilibrium gas discharges and its application in photophysics, photochemistry and photobiology
U. Kogelschatz
JOURNAL OF OPTICAL TECHNOLOGY (2012)
Exciplex emission induced by nanosecond-pulsed microdischarge arrays operating at high repetition rate frequency
Virginie Martin et al.
PLASMA SOURCES SCIENCE & TECHNOLOGY (2012)
The effect of VUV radiation from Ar/O2 plasmas on low-k SiOCH films
J. Lee et al.
JOURNAL OF PHYSICS D-APPLIED PHYSICS (2011)
HBr Plasma Treatment Versus VUV Light Treatment to Improve 193?nm Photoresist Pattern Linewidth Roughness
Erwine Pargon et al.
PLASMA PROCESSES AND POLYMERS (2011)
Reflectance of polytetrafluoroethylene for xenon scintillation light
C. Silva et al.
JOURNAL OF APPLIED PHYSICS (2010)
Prediction of UV spectra and UV-radiation damage in actual plasma etching processes using on-wafer monitoring technique
Butsurin Jinnai et al.
JOURNAL OF APPLIED PHYSICS (2010)
Reflectance and substrate currents of dielectric layers under vacuum ultraviolet irradiation
H. Sinha et al.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A (2010)
Optical emission measurements of electron energy distributions in low-pressure argon inductively coupled plasmas
John B. Boffard et al.
PLASMA SOURCES SCIENCE & TECHNOLOGY (2010)
Absolute vacuum ultraviolet flux in inductively coupled plasmas and chemical modifications of 193 nm photoresist
M. J. Titus et al.
APPLIED PHYSICS LETTERS (2009)
Vacuum ultraviolet-induced surface modification of cyclo-olefin polymer substrates for photochemical activation bonding
Young-Jong Kim et al.
APPLIED SURFACE SCIENCE (2009)
Interaction of photons with polymers: From surface modification to ablation
T Lippert
PLASMA PROCESSES AND POLYMERS (2005)
Vacuum ultraviolet photolysis of hydrocarbon polymers
FE Truica-Marasescu et al.
MACROMOLECULAR CHEMISTRY AND PHYSICS (2005)
Comparison between the ultraviolet emission from pulsed microhollow cathode discharges in xenon and argon
I Petzenhauser et al.
APPLIED PHYSICS LETTERS (2003)
Vacuum ultraviolet photochemistry of polymers
V Skurat
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS (2003)
Collisional and radiative processes in high-pressure discharge plasmas
KH Becker et al.
PHYSICS OF PLASMAS (2002)
UV-VUV excimer emitter pumped by a subnormal glow discharge
AK Shuaibov et al.
QUANTUM ELECTRONICS (2001)
Excimer formation in high-pressure microhollow cathode discharge plasmas in helium initiated by low-energy electron collisions
P Kurunczi et al.
INTERNATIONAL JOURNAL OF MASS SPECTROMETRY (2001)
Absolute intensities of the vacuum ultraviolet spectra in oxide etch plasma processing discharges
JR Woodworth et al.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS (2001)
An in situ comparison between VUV photon and ion energy fluxes to polymer surfaces immersed in an RF plasma
D Barton et al.
JOURNAL OF PHYSICAL CHEMISTRY B (2000)
Microhollow cathode discharge excimer lamps
KH Schoenbach et al.
PHYSICS OF PLASMAS (2000)