4.6 Article

Laboratory X-ray interferometry imaging with a fan-shaped source grating

Related references

Note: Only part of the references are listed.
Article Physics, Applied

Optimization of displacement Talbot lithography for fabrication of uniform high aspect ratio gratings

Zhitian Shi et al.

Summary: Displacement Talbot lithography can quickly pattern periodic nanostructures with high depth of focus over a large area, but imperfections in the phase mask profile and inaccuracies in stage movement during exposure may cause linewidth variations in the binary gratings. Proper adjustment of the scan range can compensate for this defect and achieve beating-free gratings.

JAPANESE JOURNAL OF APPLIED PHYSICS (2021)

Article Chemistry, Analytical

Fabrication of X-ray Gratings for Interferometric Imaging by Conformal Seedless Gold Electroplating

Konstantins Jefimovs et al.

Summary: A method to produce small pitch gratings for X-ray interferometric imaging applications was presented, utilizing deep reactive ion etching and conformal electroplating of Au. By optimizing etching conditions and treatment steps, void-free Au filling and oxide removal were achieved, resulting in improved phase sensitivity.

MICROMACHINES (2021)

Article Physics, Applied

X-ray scattering tensor tomography with circular gratings

Jisoo Kim et al.

APPLIED PHYSICS LETTERS (2020)

Article Materials Science, Multidisciplinary

High-Aspect-Ratio Grating Microfabrication by Platinum-Assisted Chemical Etching and Gold Electroplating

Lucia Romano et al.

ADVANCED ENGINEERING MATERIALS (2020)

Review Chemistry, Analytical

Microfabrication of X-ray Optics by Metal Assisted Chemical Etching: A Review

Lucia Romano et al.

MICROMACHINES (2020)

Article Electrochemistry

Pushing the Limits of Bottom-Up Gold Filling for X-ray Grating Interferometry

D. Josell et al.

JOURNAL OF THE ELECTROCHEMICAL SOCIETY (2020)

Review Engineering, Electrical & Electronic

Fabrication of Au gratings by seedless electroplating for X-ray grating interferometry

Matias Kagias et al.

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING (2019)

Article Engineering, Electrical & Electronic

High aspect ratio anisotropic silicon etching for x-ray phase contrast imaging grating fabrication

Patrick S. Finnegan et al.

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING (2019)

Article Multidisciplinary Sciences

Diffractive small angle X-ray scattering imaging for anisotropic structures

Matias Kagias et al.

NATURE COMMUNICATIONS (2019)

Article Engineering, Electrical & Electronic

Towards sub-micrometer high aspect ratio X-ray gratings by atomic layer deposition of iridium

Joan Vila-Comamala et al.

MICROELECTRONIC ENGINEERING (2018)

Proceedings Paper Optics

High aspect ratio silicon structures by Displacement Talbot lithography and Bosch etching

Konstantins Jefimovs et al.

ADVANCES IN PATTERNING MATERIALS AND PROCESSES XXXIV (2017)

Article Engineering, Electrical & Electronic

Hot embossing of Au- and Pb-based alloys for x-ray grating fabrication

Lucia Romano et al.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (2017)

Article Instruments & Instrumentation

Grating-based interferometry and hybrid photon counting detectors: Towards a new era in X-ray medical imaging

Spyridon Gkoumas et al.

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT (2016)

Article Chemistry, Multidisciplinary

Coherent X-ray Imaging: Bridging the Gap between Atomic and Micro-scale Investigations

Marco Stampanoni et al.

CHIMIA (2014)

Article Multidisciplinary Sciences

Non-invasive classification of microcalcifications with phase-contrast X-ray mammography

Zhentian Wang et al.

NATURE COMMUNICATIONS (2014)

Article Multidisciplinary Sciences

X-ray phase-contrast imaging at 100 keV on a conventional source

T. Thuering et al.

SCIENTIFIC REPORTS (2014)

Proceedings Paper Optics

Compact hard X-ray grating interferometry for table top phase contrast micro CT

T. Thuering et al.

MEDICAL IMAGING 2013: PHYSICS OF MEDICAL IMAGING (2013)

Article Instruments & Instrumentation

X-ray interferometer with bent gratings: Towards larger fields of view

Vincent Revol et al.

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT (2011)

Article Physics, Multidisciplinary

Phase retrieval and differential phase-contrast imaging with low-brilliance X-ray sources

F Pfeiffer et al.

NATURE PHYSICS (2006)

Article Physics, Condensed Matter

Coherent x-ray scattering

F van der Veen et al.

JOURNAL OF PHYSICS-CONDENSED MATTER (2004)

Article Physics, Applied

Demonstration of X-Ray Talbot interferometry

A Momose et al.

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS (2003)

Article Physics, Applied

Differential x-ray phase contrast imaging using a shearing interferometer

C David et al.

APPLIED PHYSICS LETTERS (2002)