Journal
OPTICS AND LASER TECHNOLOGY
Volume 138, Issue -, Pages -Publisher
ELSEVIER SCI LTD
DOI: 10.1016/j.optlastec.2020.106842
Keywords
Light extraction efficiency; GaN-LED; Nano-grooves; Transmission gratings; FEM
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Funding
- China Scholarship Council [201908320061]
- Postdoctoral Science Foundation Project of China [2018M640507]
- Open research fund of the National and Local Joint Engineering Laboratory of RF Integration and Micro-Assembly Technology [KFJJ20180202]
- Nanjing University of Posts and Telecommunications [NY218046]
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The method of using nano-grooves to improve GaN-LED light extraction efficiency was studied, and its effectiveness was experimentally verified.
Nano-grooves etched through top p-GaN layer were proposed to promote GaN-LED light extraction of small angles. The properties of grating with an optimized period of 500 nm were investigated theoretically and experimentally. The extraction efficiency increased by 50% in the +/- 10 degrees incident angle range was verified by finite element modeling and rigorous coupled-wave analysis simulations, and sufficiently explained by transmission diffractive grating theory. The GaN-LED with a depth and period of 120 nm and 500 nm, respectively, etched inside a 20 mu m diameter ring contact was fabricated and characterized by atomic force microscopy and electroluminescence testing, and the obtained results were in agreement with the design and simulations.
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