4.8 Article

Compact Biomimetic Hair Sensors Based on Single Silicon Nanowires for Ultrafast and Highly-Sensitive Airflow Detection

Journal

NANO LETTERS
Volume 21, Issue 11, Pages 4684-4691

Publisher

AMER CHEMICAL SOC
DOI: 10.1021/acs.nanolett.1c00852

Keywords

biomimetic hair sensors; airflow detection; silicon nanowires; wearable sensors

Funding

  1. Major Research Plan of the National Natural Science Foundation of China [91833303]
  2. National Natural Science Foundation of China [62004134, 51920105005]
  3. Foundation for Innovation Research Groups of the National Natural Science Foundation of China [51821002]
  4. Natural Science Foundation of Jiangsu Province [BK20200857]
  5. Collaborative Innovation Center of Suzhou Nano Science and Technology
  6. Priority Academic Program Development of Jiangsu Higher Education Institutions (PAPD)
  7. 111 Project

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This study presents a biomimetic hair sensor based on a single ultralong silicon nanowire for airflow detection, showing low detection limit and high response speed. The compact design allows for easy integration onto a flexible substrate to mimic human skin and provide comprehensive airflow information.
Wearable sensors that can mimic functionalities of human bodies have attracted intense recent attention. However, research on wearable airflow sensors is still lagging behind. Herein, we report a biomimetic hair sensor based on a single ultralong silicon nanowire (SiNW-BHS) for airflow detection. In our device, the SiNW can provide both mechanical and electrical responses in airflow, which enables a simple and compact design. The SiNW-BHSs can detect airflow with a low detection limit (<0.15 m/s) and a record-high response speed (response time <40 ms). The compact design of the SiNW-BHSs also enables easy integration of an array of devices onto a flexible substrate to mimic human skin to provide comprehensive airflow information including wind speed, incident position, incident angle, and so forth. This work provides novel-designed BHSs for ultrafast and highly sensitive airflow detection, showing great potential for applications such as e-skins, wearable electronics, and robotics.

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