Journal
MEASUREMENT SCIENCE AND TECHNOLOGY
Volume 32, Issue 12, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/1361-6501/ac20b4
Keywords
metrological spm; curvature measure; adaptive scanning grid
Funding
- National Natural Science Foundation of China [52035013, U1709206]
- Science Fund for Creative Research Groups of the National Natural Science Foundation of China [51821093]
- Zhejiang Provincial Key R&D Program of China [2018C01065]
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This paper presents an adaptive scanning path generation method based on geometry information, which reduces data amount, increases scanning speed, and preserves sufficient geometric information for performance evaluation. The method generates grid points iteratively by obtaining surface geometry knowledge step by step, focusing on curvature properties. The proposed method promises better surface reconstruction completeness and performance evaluation correctness, with simulations and experimental verifications showing its efficiency.
In this paper, we present a novel geometry information-based adaptive step (non-equidistance) scanning path generation method for metrological scanning probe microscopes. This method reduces the total amount of required data and enables faster surface scanning speed for large industrial workpieces while preserving adequate geometric information for performance evaluation after surface reconstruction. The grid points are generated iteratively while gaining knowledge of the surface geometry step by step. We focus on the curvature properties and then propose a metric for the curvature information based on the triangulated surface geometry. With certain convergence criteria on the curvature measure variation, the proposed methods promise better surface reconstruction completeness and performance evaluation correctness. Simulations on the algorithm are performed on a typical parametric surface. A brief comparison to height-based scanning algorithm is performed to show the adaptability of the novel method on curvature evaluation. Experimental verifications are conducted to show the efficiency of the proposed algorithm.
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