Journal
MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING
Volume 816, Issue -, Pages -Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.msea.2021.141323
Keywords
Nanocrystalline thin films; Microstructure; Hardness; Strain-rate sensitivity; Deformation mechanisms
Categories
Funding
- National Natural Science Foundation of China [51722104, 51761135031, 51790482]
- National Key Research and Development Program of China [2017YFA0700701, 2017YFB0702301]
- 111 Project 2.0 of China [BP2018008, BX20190266]
- China Postdoctoral Science Foundation [2019M663689]
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The hardness and strain-rate sensitivity of nano Mo thin films increased with decreasing columnar size due to the confined slip of dislocations in the columnar grains.
The size dependent hardness and strain-rate sensitivity of magnetron sputtered nanocrystalline Mo thin films with film thickness h ranging from 250 to 2000 nm were systematically investigated by using nanoindentation tests. Microstructure examinations manifested that all the as-deposited Mo thin films had a columnarnanograined hierarchical structure with highly (110)-oriented growth texture, and the lateral columnar size went through a maximum of -60 nm at h = 1500 nm sample with h. Interestingly, both the hardness and strainrate sensitivity exhibited a monotonic increment with reducing the columnar size. The underlying strengthening and deformation mechanisms could be interpreted in light of the confined slip of dislocations in the columnar grains, rather than the thermal activation of screw dislocations.
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