4.5 Article

Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices

Related references

Note: Only part of the references are listed.
Article Physics, Applied

Infrared single-photon sensitivity in atomic layer deposited superconducting nanowires

Gregor G. Taylor et al.

Summary: In this study, the extended infrared single-photon response of niobium nitride superconducting nanowires deposited by atomic layer deposition was reported. The superconducting nanowire single-photon detectors based on 4.65nm thick NbN were characterized at 2.5K, demonstrating single-photon sensitivity from 1310 to 2006nm with saturated response at shorter wavelengths.

APPLIED PHYSICS LETTERS (2021)

Article Chemistry, Multidisciplinary

Demonstration of a Thermally Coupled Row-Column SNSPD Imaging Array

Jason P. Allmaras et al.

NANO LETTERS (2020)

Article Physics, Applied

Large-area microwire MoSi single-photon detectors at 1550nm wavelength

I Charaev et al.

APPLIED PHYSICS LETTERS (2020)

Review Materials Science, Coatings & Films

Status and prospects of plasma-assisted atomic layer deposition

Harm C. M. Knoops et al.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A (2019)

Article Physics, Applied

Nanowire single-photon detectors made of atomic layer-deposited niobium nitride

E. Knehr et al.

SUPERCONDUCTOR SCIENCE & TECHNOLOGY (2019)

Article Physics, Multidisciplinary

Detecting Sub-GeV Dark Matter with Superconducting Nanowires

Yonit Hochberg et al.

PHYSICAL REVIEW LETTERS (2019)

Article Physics, Applied

Superconducting nanowire single-photon detectors fabricated from atomic-layer-deposited NbN

Risheng Cheng et al.

APPLIED PHYSICS LETTERS (2019)

Article Materials Science, Multidisciplinary

Determining the depairing current in superconducting nanowire single-photon detectors

S. Frasca et al.

PHYSICAL REVIEW B (2019)

Article Physics, Multidisciplinary

Charge quantum interference device

S. E. de Graaf et al.

NATURE PHYSICS (2018)

Article Engineering, Electrical & Electronic

Effects of Plasma Parameter on Morphological and Electrical Properties of Superconducting Nb-N Deposited by MO-PEALD

Mario Ziegler et al.

IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY (2017)

Article Materials Science, Coatings & Films

Plasma-enhanced atomic layer deposition of superconducting niobium nitride

Mark J. Sowa et al.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A (2017)

Article Optics

Single-photon imager based on a superconducting nanowire delay line

Qing-Yuan Zhao et al.

NATURE PHOTONICS (2017)

Article Physics, Applied

Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition

S. Linzen et al.

SUPERCONDUCTOR SCIENCE & TECHNOLOGY (2017)

Article Physics, Applied

Bias sputtered NbN and superconducting nanowire devices

Andrew E. Dane et al.

APPLIED PHYSICS LETTERS (2017)

Review Physics, Applied

Superconducting hot-electron bolometer: from the discovery of. hot-electron phenomena to practical applications

A. Shurakov et al.

SUPERCONDUCTOR SCIENCE & TECHNOLOGY (2016)

Article Physics, Applied

Tunable superconducting microstrip resonators

A. A. Adamyan et al.

APPLIED PHYSICS LETTERS (2016)

Article Chemistry, Multidisciplinary

Cavity-Enhanced and Ultrafast Superconducting Single-Photon Detectors

Andreas Vetter et al.

NANO LETTERS (2016)

Article Multidisciplinary Sciences

Kinetic inductance magnetometer

Juho Luomahaara et al.

NATURE COMMUNICATIONS (2014)

Article Engineering, Electrical & Electronic

Back-End Deposited Silicon Photonics for Monolithic Integration on CMOS

Yoon Ho Daniel Lee et al.

IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS (2013)

Article Optics

Detecting single infrared photons with 93% system efficiency

F. Marsili et al.

NATURE PHOTONICS (2013)

Article Materials Science, Multidisciplinary

Coherent flux tunneling through NbN nanowires

J. T. Peltonen et al.

PHYSICAL REVIEW B (2013)

Article Physics, Applied

Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition

Mario Ziegler et al.

SUPERCONDUCTOR SCIENCE & TECHNOLOGY (2013)

Article Physics, Applied

Tantalum nitride superconducting single-photon detectors with low cut-off energy

A. Engel et al.

APPLIED PHYSICS LETTERS (2012)

Article Materials Science, Multidisciplinary

Kinetic impedance and depairing in thin and narrow superconducting films

John R. Clem et al.

PHYSICAL REVIEW B (2012)

Article Materials Science, Multidisciplinary

Geometry-dependent critical currents in superconducting nanocircuits

John R. Clem et al.

PHYSICAL REVIEW B (2011)

Article Materials Science, Multidisciplinary

Optical and transport properties of ultrathin NbN films and nanostructures

A. Semenov et al.

PHYSICAL REVIEW B (2009)

Article Physics, Applied

Current-induced critical state in NbN thin-film structures

K. Il'in et al.

JOURNAL OF LOW TEMPERATURE PHYSICS (2008)