4.5 Article

Interference-enhanced deep-ultraviolet Raman signals of hexagonal boron nitride flake and its underlying silicon substrate

Journal

JOURNAL OF RAMAN SPECTROSCOPY
Volume 52, Issue 12, Pages 2160-2165

Publisher

WILEY
DOI: 10.1002/jrs.6228

Keywords

deep ultraviolet excitation; hexagonal boron nitride; interference effect; multilayered dielectric structure; two-dimensional material

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Funding

  1. National Key Research and Development Program of China [2016YFA0301204]
  2. National Natural Science Foundation of China [11874350, 12004377]

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By adjusting the thickness of the SiO 2 layer in the SiO 2/Si substrate, Raman signals from ultra-thin layered materials and the underlying substrate can be significantly enhanced under deep ultraviolet excitation.
We take hexagonal boron nitride (hBN) flakes exfoliated on SiO 2/Si substrates as a prototype, to demonstrate how to enhance the Raman signals both from ultra-thin layered materials and the underlying opaque substrate excited by deep ultraviolet (DUV) laser. We found that the interference effect in the hBN/SiO 2/Si multilayered structure can largely enhance Raman intensity of hBN flake and the underlying Si substrate under 266-nm excitation. This enhancement effect is more significant than that under visible excitation. With increasing the thickness of SiO 2 layer in the substrate, the corresponding hBN and Si Raman intensity can vary by up to similar to 4 and similar to 2 orders of magnitude under 266-nm excitation, respectively. This method can be applicable to enhance Raman signal from other two-dimensional materials under DUV excitation by tuning the thickness of SiO 2 layer in the SiO 2/Si substrate.

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