Journal
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 874, Issue -, Pages -Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.jallcom.2021.159864
Keywords
Inverted-pyramid; Cu MACE; Transition metal oxide; Heterojunction; Photodetector; Responsivity
Categories
Funding
- National Natural Science Foundation of China [617704084]
- Fundamental Research Funds for the Central Universities [NG2019003]
- special fund of Jiangsu province for the transformation of scientific and technological achievements [BA2019047]
- Key Laboratory of Materials Preparation and Protection for Harsh Environment, Ministry of Industry and Information Technology [XCA20013-3]
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In this work, inverted-pyramid light trapping texture on industrial-sized p-type silicon was prepared using a rapid and repeatable one-step Cu-MACE process at room temperature. Various TMOs-Si heterojunction photodetectors were fabricated, with a high-performance NIR PD demonstrated through optimizing device structure and layer thickness. The study paves the way for mass production of TMOs-Si heterojunction PDs using inverted-pyramid textured silicon.
Micro and nano light-trapping structures are widely applied to improve the performance of optoelectronic devices. In this work, inverted-pyramid light trapping texture on industrial-sized p-type silicon was prepared by a rapid and repeatable one-step room-temperature Cu-MACE process. On this basis, various TMOs (transition metal oxide)-Si heterojunction photodetectors (PDs) are fabricated by a low-temperature process. After careful comparison, a ZnO/Al2O3/p-Si/Al2O3/CuO heterojunction is selected as the ideal device structure, and the corresponding work mechanism is proposed. Finally, by optimizing the Al2O3 tunneling layers' thickness, a high-performance NIR PD working at 980 nm and -5 V bias stands out. The bifacial carrier selective transportation PD exhibits a considerable detectivity (5.56 x 10(11) Jones) and a high responsivity (7.10 A/W). Our work will expand the application of inverted-pyramid textured silicon and will pave a road for mass fabrication of TMOs-Si heterojunction PD. (c) 2021 Elsevier B.V. All rights reserved.
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