Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 60, Issue 8, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.35848/1347-4065/ac138a
Keywords
Nanodevice; nanomaterials; Nanofabrication; atomic-force microscopy; Electron-beam lithography
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Funding
- JSPS KAKENHI [JP18H03899]
- Japanese Ministry of Education, Culture, Sports, Science and Technology (MEXT) Top Global University Project (SGU) scholarship
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A marker system based on binary translation of two-dimensional coordinates was developed for the positional determination of individual nanomaterial adsorbed on a substrate. The coordinate markers were successfully used to prepare field-effect transistors with thin bundles of single-walled carbon nanotubes.
A marker system based on the binary translation of two-dimensional coordinate numbers was developed to facilitate the positional determination of individual nanomaterial adsorbed randomly on a substrate. The design of the coordinate markers enabled simple calculations of the position of the selected individual nanomaterial from an atomic force microscope image. This position information was used to fabricate metal contact structures for the selected nanomaterial. We demonstrated that the coordinate markers were successfully used to prepare field-effect transistors with a thin bundle of single-walled carbon nanotubes.
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