4.6 Article

Concave Array Ultrasonic Transducer From Multilayer Piezoelectric Ceramic for Photoacoustic Imaging

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TUFFC.2021.3077889

Keywords

Transducers; Acoustics; Ultrasonic transducer arrays; Impedance; Ceramics; Nonhomogeneous media; Acoustic arrays; Concave array; multilayer ceramic (MLC); piezoelectric; photoacoustic; transducer; ultrasonic

Funding

  1. National Research Foundation, Singapore
  2. Agency for Science, Technology and Research (A*STAR) through the Foundation Competitive Research Program of Singapore at IMRE [NRF-CRP15-2015-04, SC25/16-9P1122]

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This article presents the design and fabrication of a focused 5-MHz 128-element linear-array ultrasonic transducer with concave structure, using piezoelectric ceramic, showcasing higher bandwidth and lateral resolution.
Implementation of piezoelectric multilayer ceramic (MLC) is an effective way to reduce impedance and improve the performance of linear-array transducer for ultrasonic system applications. However, the ultrasonic image derived from a planar linear-array transducer generally suffers from degradation of lateral resolution and contrast. In this article, we designed and fabricated a focused 5-MHz 128-element linear-array ultrasonic transducer with concave structure using five-layered 0.1Pb (Ni1/3Nb2/3)O-3 -0.35Pb(Zn1/3Nb2/3)O-3 -0.15Pb(Mg1/3Nb2/3)O-3-0.1PbZrO(3)-0.3PbTiO(3) (PNN-PZN-PMN-PZ-PT) piezo- electric ceramic. The transducer showed a bandwidth of 63% at -6 dB and the lateral resolution up to 0.33 mm. An improved transmission signal of 90% higher than a commercial single-layer ceramic transducer was also achieved. We further demonstrated high-resolution photoacoustic imaging with the obtained concave linear-array transducer.

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