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Hydrogen Behavior in Top Gate Amorphous In-Ga-Zn-O Device Fabrication Process During Gate Insulator Deposition and Gate Insulator Etching

IEEE TRANSACTIONS ON ELECTRON DEVICES (2021)

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Hydrogen Behavior in Top Gate Amorphous In-Ga-Zn-O Device Fabrication Process During Gate Insulator Deposition and Gate Insulator Etching

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