Journal
IEEE SENSORS JOURNAL
Volume 21, Issue 18, Pages 20086-20091Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSEN.2021.3098592
Keywords
Silicon cantilever; fiber-optic acoustic sensor; silicon-on-insulator; absolute cavity length demodulation
Funding
- National Natural Science Foundation of China [11904045, 61905034, 61705031, 62075025]
- China Postdoctoral Science Foundation [2020M673542]
- Doctoral Start-up Foundation of Liaoning Province [2019-BS-051]
- Natural Science Foundation of Liaoning Province [2019-MS-054]
- Central University Basic Research Fund of China [DUT20RC(4)014]
- State Grid Corporation of China [521205190014]
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The silicon cantilever-based fiber-optic acoustic sensor has advantages of high sensitivity, small size, and good stability, showing linear response at different frequencies and a wide operating bandwidth.
A silicon cantilever-based fiber-optic acoustic sensor (FOAS) is presented in this work. A rectangular cantilever is fabricated upon a silicon-on-insulator (SOI) wafer using a micro-electro-mechanical system (MEMS). The length, width and thickness of the silicon cantilever are 530 mu m, 200 mu m and 3 mu m, respectively. The resonant frequency of the silicon cantilever is 14820 Hz with a sensitivity of 950 nm/Pa. An ultra-high speed absolute cavity length demodulation method is adopted using a complementary metal oxide semiconductor (CMOS) spectrometer and an 850 nm superluminescent light emitting diode (SLED). A modified Buneman frequency estimation and total phase demodulation algorithm is adopted. The frequency response curve shows a relatively flat trend from 20 Hz to 13 kHz. The sensor exhibits good linearities at different frequencies while the applied acoustic pressure is increased from 0 Pa to 2.5 Pa. Experimental results indicate that the minimum detectable pressure (MDP) of the proposed FOAS is calculated to be 25.68 mu Pa/Hz(1/2) at the frequency of 13 kHz. The silicon cantilever-based FOAS achieves broad operating bandwidth, high sensitivity, small size, and good stability.
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