Related references
Note: Only part of the references are listed.A dual-frequency piezoelectric micromachined ultrasound transducer array with low inter-element coupling effects
Lifang Liu et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2021)
Array Design of Piezoelectric Micromachined Ultrasonic Transducers With Low-Crosstalk and High-Emission Performance
Tingzhong Xu et al.
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL (2020)
Piezoelectric Micromachined Ultrasonic Transducer With Superior Acoustic Outputs for Pulse-Echo Imaging Application
Yuedong Fu et al.
IEEE ELECTRON DEVICE LETTERS (2020)
An ultrasonic flowmeter for liquid flow measurement in small pipes using AlN piezoelectric micromachined ultrasonic transducer arrays
Ke Zhu et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2020)
Investigation of Broadband Characteristics of Multi-Frequency Piezoelectric Micromachined Ultrasonic Transducer (MF-pMUT)
Changhe Sun et al.
IEEE SENSORS JOURNAL (2019)
Transmitting Sensitivity Enhancement of Piezoelectric Micromachined Ultrasonic Transducers via Residual Stress Localization by Stiffness Modification
Xuying Chen et al.
IEEE ELECTRON DEVICE LETTERS (2019)
Dual-frequency piezoelectric micromachined ultrasonic transducers
Lixiang Wu et al.
APPLIED PHYSICS LETTERS (2019)
Multi-Frequency Piezoelectric Micromachined Ultrasonic Transducers
Hanle Kazari et al.
IEEE SENSORS JOURNAL (2019)
Piezoelectric Micromachined Ultrasonic Transducer Using Silk Piezoelectric Thin Film
Jose Joseph et al.
IEEE ELECTRON DEVICE LETTERS (2018)
A feasibility study of piezoelectric micromachined ultrasonic transducers fabrication using a multi-user MEMS process
Lawrence L. P. Wong et al.
SENSORS AND ACTUATORS A-PHYSICAL (2016)
Design and Characterization of a Capacitive Micromachined Transducer With a Deflectable Bottom Electrode
Tahereh Arezoo et al.
IEEE ELECTRON DEVICE LETTERS (2015)
Modeling, Fabrication, and Characterization of Piezoelectric Micromachined Ultrasonic Transducer Arrays Based on Cavity SOI Wafers
Yipeng Lu et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2015)