Journal
IEEE ELECTRON DEVICE LETTERS
Volume 42, Issue 6, Pages 919-922Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2021.3075853
Keywords
Electrodes; Sensitivity; Resonant frequency; Stress; Imaging; Acoustics; Ultrasonic imaging; Piezoelectric micromachined ultrasonic transducers (pMUTs); dual frequency; ultrasound
Categories
Funding
- National Natural Science Foundation of China [51875521]
- Zhejiang Provincial Natural Science Foundation of China [LZ19E050002]
- Program of China Scholarship Council [201906320183]
- Zhejiang University Academic Award for Outstanding Doctoral Candidates [2019021]
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Dual-frequency piezoelectric micromachined ultrasonic transducers (pMUTs) with a beam-membrane coupled structure maintain high sensitivity for both in-phase and out-of-phase modes, achieving optimal transmitting and receiving sensitivities for different frequencies.
Dual-frequency piezoelectric micromachined ultrasonic transducers (pMUTs) are attractive for ultrasonic imaging, which can meet the requirements of large detection depth and high resolution simultaneously. In this letter, we propose a dual-frequency pMUT via beam-membrane coupled structure. The beam-membrane coupled pMUTs (BM-pMUTs) inherently have two fundamental resonant frequencies, corresponding to in-phase and out-of-phase modes. The dual-electrode design is utilized to compensate the sensitivity of out-of-phase mode, hence the BM-pMUTs maintain high sensitivity for both two operation modes. Experimental results show that the optimal transmitting sensitivities of BM-pMUTs are 18 nm/V at 103 kHz and 26 nm/V at 220 kHz when characterized in oil, as well as the optimal receiving sensitivities are 572.1 mV/MPa at 103 kHz and 581.8 mV/MPa at 220 kHz.
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