4.6 Article

Temperature dependence of Young's modulus of single-crystal diamond determined by dynamic resonance

Journal

DIAMOND AND RELATED MATERIALS
Volume 116, Issue -, Pages -

Publisher

ELSEVIER SCIENCE SA
DOI: 10.1016/j.diamond.2021.108403

Keywords

Single crystal diamond; Young's modulus; High temperature; Mechanical resonance

Funding

  1. JSPS KAKENHI [20H02212, 15H03999, 15H03980]
  2. Science and Nanotechnology Platform - Ministry of Education, Culture, Sports, Science and Technology (MEXT) of Japan
  3. Tsukuba Global Innovation Promotion Agency
  4. China Scholarship Council (CSC) [201906400064]

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This study investigates the Young's modulus of (100) oriented single-crystal diamond from room temperature to 700 degrees C, using a dynamic resonance frequency method based on experimental and theoretical approaches. The results show that the Young's modulus of SCD follows the same model as temperature increases, providing a convenient and accurate method to measure the dependency of SCD Young's modulus on temperature.
Young's modulus is a key parameter for mechanical engineering and always performs a significant role in materials design. Diamond has been regarded as an ideal material for MEMS devices and can be used in complex environments, which requires a quantitative and accurate measurement of the Young's modulus. However, as a material with outstanding mechanical rigidity and chemical inertness, the wide temperature dependent Young's modulus of single-crystal diamond (SCD) is rarely reported. In this paper, the Young's modulus of (100) oriented SCD from room temperature to 700 degrees C is determined experimentally and theoretically by dynamic resonance frequency method based on SCD MEMS cantilevers and first-principles calculation. The dependence of the Young's modulus of SCD is obtained by the resonance frequencies shift of the SCD cantilevers. The results show that despite different residual stress in each measured cantilever, the Young's modulus of SCD versus temperature obeys the same model as temperature increases from room temperature to 700 degrees C, consistent with the results calculated from the first-principles calculation. This research proposes a convenient and accurate method to measure the dependence of SCD Young's modulus on temperature, which provides a valuable reference for the advanced development of SCD MEMS and other mechanical applications.

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