Journal
APPLIED SURFACE SCIENCE
Volume 572, Issue -, Pages -Publisher
ELSEVIER
DOI: 10.1016/j.apsusc.2021.151338
Keywords
Surface charging; Charge compensation; Neutral gas effect; GCIB; ToF-SIMS
Categories
Funding
- Korea Basic Science Institute [D110100]
- National Research Council of Science & Technology (NST), Republic of Korea [D110100] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
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By measuring the surface potential of a polymer film, the effect of gas on charge compensation was investigated. The experimental results showed that the type of injected gas may impact the surface charging of the sample.
Surface charging of an insulating sample has been a significant issue in surface analysis. In time-of-flight secondary ion mass spectrometry, the charge also accumulates on the surface of an insulating sample by the primary ion beam, such as an argon gas cluster ion beam. Such charging can lead to not only degraded mass resolution but also low image resolution, and thus it is necessary to compensate for surface charging of insulating sample. Therefore, several efficient methods have been proposed for charge compensation, such as using a low-energy electron flood gun, applying a bias voltage to the sample stage, and using a gas flooding system. Here, we measured the surface potential of a polymer film to investigate the gas effect on the charge compensation using a Kelvin probe. During the measurements, the chamber pressure was gradually increased by injecting gases, such as He, Ne, Ar, N-2, and O-2. We found that the injection gas may reduce the surface charging of the sample, depending on the type of gas.
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