Long-term changes in AI thin-film extreme ultraviolet filters

Thin-film Al filters are very popular owing to their high transmittance in the wavelength range of 17-67 nm and low transmittance in the visible and near-UV regions; however, they are prone to oxidation. The amorphous Al2O3 layers on the Al surfaces have much smaller transmittance than the bulk Al material; therefore, they strongly influence the total transmittance of the filter. This paper not only provides the transmittance of very old Al filters but also maps the transmittance development of AI filters over two years since their delivery (in 2016) in an uncontrolled atmosphere. (C) 2021 Optical Society of America

Automated summary

This paper investigates the transmittance and oxidation issues of thin-film Al filters, revealing that the amorphous Al2O3 layers have a significant impact on the total transmittance of the filters.