Journal
ADVANCED FUNCTIONAL MATERIALS
Volume 31, Issue 41, Pages -Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/adfm.202105003
Keywords
2D semiconductor field-effect transistors; charge carrier mobility; contact resistance; parameters extraction
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Funding
- National Research Foundation Competitive Research Programs [NRF-CRP24-2020-0002]
- A*STAR Science and Engineering Research Council under its AME IRG Program [A2083c0061]
- Ministry of Education Tier-2 Grant [MOE-T2EP50120-0016]
- Applied Materials-NUS Advanced Corporate Laboratory Scholarship [A*STAR IAF-ICP I1801E0022]
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A universal and simple method has been developed in this study to accurately extract critical parameters in 2D FETs, including characteristic temperature (T-o), threshold voltage (V-T), R-SD, and mu(int), and the practicality of this method is extensively explored by characterizing the temperature-dependent carrier transport behavior and strain-induced band structure modification in 2D semiconductors.
2D semiconductor field-effect transistors (2D FETs) have emerged as a promising candidate for beyond-silicon electronics applications. However, its device performance has often been limited by the metal-2D semiconductor contact, and the non-negligible contact resistance (R-SD) not only deteriorates the on-state current but also hinders the direct characterization of the intrinsic properties of 2D semiconductors (e.g., intrinsic charge carrier mobility, mu(int)). Therefore, a proper extraction technique that can independently characterize the metal-2D semiconductor contact behavior and the intrinsic properties of a 2D semiconducting layer is highly desired. In this study, a universal yet simple method is developed to accurately extract the critical parameters in 2D FETs, including characteristic temperature (T-o), threshold voltage (V-T), R-SD, and mu(int). The practicability of this method is extensively explored by characterizing the temperature-dependent carrier transport behavior and the strain-induced band structure modification in 2D semiconductors. Technology computer aided design simulation is subsequently employed to verify the precision of R-SD extraction. Furthermore, the universality of the proposed method is validated by successfully implementing the extraction to various 2D semiconductors, including black phosphorus, indium selenide, molybdenum disulfide, rhenium disulfide, and tungsten disulfide with top- and bottom-gated configurations.
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