Ultra-precision direct diamond shaping of functional micro features

As technological components continue to utilize space effectively within devices without compromise to their operational efficiency, the relevance of accurate and precise parts with good tolerances and surface finishing has shot to prominence. Ultra-Precision Machining (UPM) technology has constantly risen to the challenge by realizing components with superior geometrical accuracies and mirror-like surface finishes, much of which are required in the optical industry. However, conventional diamond shaping processes are usually limited to rotary symmetric components or linear gratings. Thus, the developed Virtual Rotating Tool Shaping (VRTS) addresses these issues by enabling the UPM to fabricate non-rotary symmetric, intricate and freeform elements by Direct Diamond Shaping (DDS). VRTS synchronizes the linear and rotational motions of the ultra-precision machine to constantly align the tool with the cutting direction, while compensating in the linear axes for the run-off. As such, DDS can now achieve a combination of linear and rotary features by planing. In this paper, the developed DDS technique is presented with experimental verifications of the algorithm on a segmented bi-focal Fresnel lens and a serpentine micro-channel, followed by the corresponding analyses.

Automated summary

This paper introduces a method to fabricate non-rotary symmetric, intricate, and freeform elements using Ultra-Precision Machining (UPM) technology, Virtual Rotating Tool Shaping (VRTS), and Direct Diamond Shaping (DDS). VRTS synchronizes linear and rotational motions of the machine to align the tool with the cutting direction, while DDS achieves a combination of linear and rotary features by planing.