Journal
MICROMACHINES
Volume 12, Issue 5, Pages -Publisher
MDPI
DOI: 10.3390/mi12050483
Keywords
micromirror arrays; microlithography; microscopy; image generation; wavefront shaping
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Funding
- European Union [215597]
- German ministry of education and research (BMBF) [16SV5043]
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The Fraunhofer Institute for Photonic Microsystems (IPMS) has been developing and manufacturing micromirror arrays for more than 20 years, originally focusing on microlithography applications in the deep ultraviolet range, but now expanding to applications in the visible and near-infrared range.
The Fraunhofer Institute for Photonic Microsystems (IPMS) has been developing and manufacturing micromirror arrays for more than 20 years. While originally focusing on applications related to microlithography and therefore mainly for light in the deep ultraviolet range, the range of applications has been expanded since, including applications in the visible and near-infrared range. This paper gives an overview of the devices and their designs, fabrication, and characterization.
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