Journal
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
Volume 36, Issue 7, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/1361-6641/abfe9a
Keywords
GaN p-channel HFETs; InGaN; GaN; AlGaN heterostructure; polarization induced doping
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Funding
- Youth Innovation Promotion Association CAS [20200321]
- National Natural Science Foundation of China [61774014]
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This work introduces a new type of p-type polarization-induced doping recessed-gate p-channel InGaN/GaN/AlGaN heterostructure field-effect transistor, which increases the current density of the device by introducing different material structures and doping methods, and also enables the adjustment of threshold voltages. This study provides reference information for the design of E-mode high-performance p-channel GaN devices.
In this work, p-type polarization-induced doping (PID) recessed-gate p-channel InGaN/GaN/AlGaN heterostructure field-effect transistors (HFETs) are proposed. It is found that the current density of the device can be increased by introducing an InGaN/GaN/AlGaN heterojunction and p-type PID. The simulation results show that the current density can apparently be increased (from 3.42 mA mm(-1) to 7.31 mA mm(-1)) due to the increased hole concentration introduced by the InGaN/GaN/AlGaN heterojunction and the p-type PID. Different threshold voltages can be obtained by adjusting the GaN channel thickness, and normally-off p-channel HFETs with a negative V (TH) of -1 V were produced when a 6 nm GaN channel thickness was retained. These results may provide some reference information for the design of E-mode high-performance p-channel GaN devices.
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