4.6 Article

Space-charge induced particle reflection between hybrid AC/DC biased electrodes

Journal

PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 30, Issue 5, Pages -

Publisher

IOP PUBLISHING LTD
DOI: 10.1088/1361-6595/abfbed

Keywords

space-charge limit; particle reflection; RF biasing; space-charge oscillations

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It has been found that there are important similarity parameters between particle extraction systems using hybrid AC/DC biasing and conventional DC biased systems. The onset of particle reflection depends on the AC frequency, voltage magnitude, and initial particle injection velocity. When the injection current exceeds the AC limit, the system becomes unstable and generates self-excited space-charge oscillations.
Space-charge limited current flow between DC biased electrodes is a widely applicable problem in many areas of physics. Recently, radio-frequency biasing, together with DC self-bias formation, has been studied as a new concept for the extraction of charged particles from an upstream plasma source. Here, we compare particle extraction between systems using this hybrid AC/DC biasing, with conventional DC biased electrodes, and identify important similarity parameters. The injection current first leading to particle reflection strongly depends on the applied AC frequency and voltage magnitude, as well as the initial particle injection velocity, and is in general lower than the DC case. For injection currents above the AC limit, the system becomes unstable, and self-excited space-charge oscillations are generated. A critical parameter is the ratio of the average particle transit time between the electrodes to the AC period, gamma = t(L)/T. As long as gamma >> 1, the onset of particle reflection can be sufficiently delayed that the extracted current approaches the DC limit.

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