4.6 Article

Enhancing the stability of polymer nanostructures via ultrathin oxide coatings for nano-optical device applications

Journal

NANOTECHNOLOGY
Volume 32, Issue 29, Pages -

Publisher

IOP PUBLISHING LTD
DOI: 10.1088/1361-6528/abf300

Keywords

polymer nanostructures; stability; PMMA; ultrathin TiO(2)coating

Funding

  1. National Natural Science Foundation of China [51805160, 51722503, 51621004, 11574078]
  2. Ministry of Science and Technology of the People's Republic of China [2018YFE0109200]
  3. College Science Foundation of Bureau of Education of Guangzhou Municipality [202032830]
  4. State Key Laboratory of Laser Interaction with Matters [SKLLIM1803]

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A simple approach to improve the stability of polymer nanostructures by coating a conformal ultrathin oxide film has been proposed and demonstrated in this work. The oxide layer enhances the stability of polymer structures by prohibiting deformation occurrences from thermally induced reflow and organic solution. Coated polymer structures show high temperature stability and good resistance to soluble damage, which significantly broadens their application as functional elements for optical structures/devices.
Polymer nanostructures have drawn tremendous attention due to their wide applications in nanotechnology. However, the morphology of the polymer nanostructures is fragile under harsh conditions such as high-power irradiation and organic-solution environments during the fabrication or the measurement processes, significantly limiting their potential applications. In this work, we propose and demonstrate a simple approach to improve the stability of polymer nanostructures by coating a conformal ultrathin oxide film via atomic-layer deposition. Due to the refractory and dense coating of the oxide layer, the stability of polymer structures is enhanced by the prohibition of deformation occurrences from thermally induced reflow and organic solution. As a proof of concept, poly(methyl methacrylate) (PMMA) nanostructures coated with a sub-10-nm TiO2 layer are demonstrated, and the structures exhibit high temperature stability at 180 degrees C and good resistance to soluble damage from organic solutions. Subsequently, the mechanism of the improved thermal stability is analyzed via mechanical simulations. Such an effective approach is proposed to significantly broaden the application of polymer nanostructures as functional elements for optical structures/devices that require excellent thermal and chemical stability.

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