Journal
NANO LETTERS
Volume 21, Issue 9, Pages 3915-3921Publisher
AMER CHEMICAL SOC
DOI: 10.1021/acs.nanolett.1c00559
Keywords
maskless nanolithography; femtosecond pulse laser; digital micromirror device; cross-scale patterning; optical diffraction limit
Categories
Funding
- National Key Research and Development Program of China [2016YFA0200500, 2017YFB1104300]
- National Natural Science Foundation of China (NSFC) [61975213, 61475164, 51673208]
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The proposed maskless optical projection nanolithography (MLOP-NL) technique provides an efficient means of achieving cross-scale patterning with large-scale and precise configuration.
The emerging demand for device miniaturization and integration prompts the patterning technique of micronano-cross-scale structures as an urgent desire. Lithography, as a sufficient patterning technique, has been playing an important role in achieving functional micronanoscale structures for decades. As a promising alternative, we have proposed and demonstrated the maskless optical projection nanolithography (MLOP-NL) technique for efficient cross-scale patterning. A minimum feature size of 32 nm, which is lambda/12 super resolution breaking the optical diffraction limit, has been achieved by a single exposure. Furthermore, multiscale two-dimensional micronano-hybrid structures with the size over hundreds of micrometers and the precision at tens of nanometers have been fabricated by simply controlling the exposure conditions. The proposed MLOP-NL technique provides a powerful tool for achieving cross-scale patterning with both large-scale and precise configuration with high efficiency, which can be potentially used in the fabrication of multiscale integrated microsystems.
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