Journal
JOURNAL OF NON-CRYSTALLINE SOLIDS
Volume 558, Issue -, Pages -Publisher
ELSEVIER
DOI: 10.1016/j.jnoncrysol.2021.120662
Keywords
CO2 laser; Rapid ablation mitigation; Fused silica; Physical mechanism; Surface morphology; Periodic structures
Funding
- National Natural Science Foundation of China [51775147, 51705105]
- Science Challenge Project [TZ2016006-0503-01]
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The intrinsic physical mechanism of CO2 laser rapid ablation mitigating micro-defects on fused silica optics surface was studied through experiments and simulations, analyzing the temperature distribution, heat affected zone, solid-liquid transition process, and surface morphology evolution under the action of moving pulsed laser. The study concluded that the periodic structural features at the bottom of surface morphology are formed by the super-position of residual height of linear laser processing.
The intrinsic physical mechanism of CO2 laser rapid ablation mitigation micro-defects on fused silica optics surface are studied through experiments and simulations. Based on the multi-physics coupling mathematical model involving the stages of phase transition, melting flow and evaporative ablation, the calculated depth of Gaussian ablation crater and protrusion height at the edge formed by single laser pulse are 5.05 mu m and 25 nm respectively, which agrees well with the experiment. Then, the temperature distribution, heat affected zone, solid-liquid transition process and surface morphology evolution under the action of moving pulsed laser are analyzed. Through studies of the relationship between laser parameters and processed surface quality, it can be concluded that the periodic structural features at the bottom of surface morphology are formed by the super-position of residual height of linear laser processing. Laser with short pulse width is more likely to cause material redeposition on the surface of fused silica optics.
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