Journal
IEEE ELECTRON DEVICE LETTERS
Volume 42, Issue 4, Pages 473-476Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2021.3058380
Keywords
GaN-on-Si; quasi-vertical; Schottky barrier diode; doping; edge termination; high voltage
Categories
Funding
- Guangdong Province Key-Area Research and Development Program [2019B010130001, 2019B090904002, 2019B090909004, 2019B090917005, 2020B010174004]
- Natural Science Foundation of China [61775230, 61804162, 61874131, 62074158]
- Strategic Priority Research Program of CAS [XDB43000000, XDB43020200]
- Key Research Program of Frontier Sciences, CAS [QYZDB-SSW-JSC014, ZDBS-LY-JSC040]
- Key Research and Development Program of Jiangsu Province [BE2020004-2]
- Suzhou Science and Technology Program [SYG201927]
- Natural Science Foundation of Jiangsu Province [BK20180253]
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A high-performance quasi-vertical GaN Schottky barrier diode (SBD) was fabricated successfully with a high-quality n(-)-GaN drift layer and precisely-controlled n-type doping, achieving a high current on/off ratio, low specific on-resistance, and relatively high breakdown voltage. Additionally, with an Argon-implanted termination, a record high breakdown voltage of 405 V was achieved while maintaining good forward conduction characteristics for the GaN-on-Si SBD.
A high-performance quasi-vertical GaN Schottky barrier diode (SBD) was successfully fabricated by using a high-quality n(-)-GaN drift layer with a precisely-controlled n-type doping. A high current on/off ratio of 10(10), an ideality factor of 1.03, a low specific on-resistance of 1.41 m Omega.cm(2), and a relatively high breakdown voltage (BV) of 250 V have been achieved for the SBD without edge termination. Furthermore, with an Argon-implanted termination, the as fabricated GaN-on-Si SBD shows a record high BV of 405 V, yielding a critical electric field of similar to 2 MV/cm, while the forward conduction characteristics are well maintained.
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