4.7 Article

Stereolithographic additive manufacturing diamond/SiC composites with high thermal conductivity for electronic 3D-packaging applications

Journal

CERAMICS INTERNATIONAL
Volume 47, Issue 10, Pages 14009-14020

Publisher

ELSEVIER SCI LTD
DOI: 10.1016/j.ceramint.2021.01.270

Keywords

Diamond; SiC composite; Additive manufacturing; Stereolithography; Thermal conductivity; Electronic packaging

Funding

  1. National Key R&D Program of China [2018YFE0207900]
  2. National Natural Science Foundation of China [51835010]
  3. Shaanxi Province SciTech Integrated Innovation Engineering project [2019ZDLGY0403]

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The manufacturing method combining stereolithography-based process with reactive melt infiltration can produce diamond/SiC composites with high-precision complex structures for electronic packaging applications. However, challenges such as light-scattering and bending affecting precision during manufacturing process still need to be addressed.
Diamond/SiC composites with high thermal conductivity are important materials for electronic industry, especially electronic packaging, but their complex structures and high-precision manufacturing are still challenging issues. Stereolithography-based manufacturing method combined with the reactive melt infiltration to make diamond/SiC composites with high-precision complex structures has been proposed in this paper. Diamond particles were used as the raw material, and as the particle size is a key factor affecting composite performance its influence was studied by means of measuring parameters, examining microstructure, and detecting components, whereas related mechanisms are discussed as necessary. Subsequently, a diamond/SiC composite with the thermal conductivity of 245.68 W/(m K) has been prepared and used in experiment. The experiment shows that the precision is affected by light-scattering and bending in the printing plane and in the vertical plane respectively, with the size errors of 0.25 and 0.12 mm.

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