Effect of magnesium content and growth temperature on structural and optical properties of USCVD-grown MgZnO films

Magnesium zinc oxide (MgxZn1-xO) films (x < 0.4) have been grown by ultrasonic spray chemical vapor deposition on soda-lime glass substrates for different growth temperature and different Mg mole fractions (x). Effects of Mg content in the liquid solution and the effect of growth temperature on optical and structural properties of MgZnO films have been investigated with X-ray diffraction, atomic force microscope, and UV-visible spectrophotometry measurements. The growth temperature has a significant effect on determining the Mg mole fractions of MgZnO films. There is a linear correlation between the measured Mg mole fraction in the resulted grown structures and Mg content in the solution. The peak of (0002) diffraction for the grown samples has been shifted to the higher diffraction angles with increase in Mg content in the liquid solution and has also become stronger. The growth temperature and Mg content in a liquid solution are crucial parameters in the controlling Mg mole fraction of samples.

Automated summary

The study looked at the effects of magnesium content and growth temperature on the optical and structural properties of magnesium zinc oxide films, finding a linear correlation between magnesium mole fraction and magnesium content in the liquid solution. The peak of the (0002) diffraction for the grown samples shifted to higher angles and became stronger with increasing magnesium content in the liquid solution. Both growth temperature and magnesium content in the liquid solution are crucial parameters in controlling the magnesium mole fraction of the samples.