4.8 Article

The Mechanism of Graphene Vapor-Solid Growth on Insulating Substrates

Journal

ACS NANO
Volume 15, Issue 4, Pages 7399-7408

Publisher

AMER CHEMICAL SOC
DOI: 10.1021/acsnano.1c00776

Keywords

graphene growth; chemical vapor deposition; first-principles calculation; insulating substrates; vapor-solid growth; kinetic Wulff construction

Funding

  1. National Natural Science Foundation of China [21773002]
  2. National Key Basic Research Program of China [2016YFA0200103]
  3. Beijing National Laboratory for Molecular Sciences, China [BNLMS-CXTD-202001]
  4. Beijing Municipal Science & Technology Commission, China [Z1811000004818003]
  5. institute for Basic Science, South Korea [IBS-R019-D1]

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Researchers systematically explored the absorption of carbon species on insulating substrates and found that graphene growth is dominated by reactions between active carbon species and hydrogen-passivated graphene edges, rather than being influenced by the substrate type. The gas phase precursor CH3 plays crucial roles in feeding graphene growth and removing excessive hydrogen atoms from graphene edges during growth on insulating substrates. The calculated threshold reaction barriers for graphene growth on insulating substrates suggest that zigzag edges grow faster than armchair edges.
Wafer-scale single-crystal graphene film directly grown on insulating substrates via the chemical vapor deposition (CVD) method is desired for building high-performance graphene-based devices. In comparison with the well-studied mechanism of graphene growth on transition metal substrates, the lack of understanding on the mechanism of graphene growth on insulating surfaces greatly hinders the progress. Here, by using first-principles calculation, we systematically explored the absorption of various carbon species CHx (x = 0, 1, 2, 3, 4) on three typical insulating substrates [h-BN, sapphire, and quartz] and reveal that graphene growth on an insulating surface is dominated by the reaction of active carbon species with the hydrogen-passivated graphene edges and thus is less sensitive to the type of the substrate. The dominating gas phase precursor, CH3, plays two key roles in graphene CVD growth on an insulating substrate: (i) to feed the graphene growth and (ii) to remove excessive hydrogen atoms from the edge of graphene. The threshold reaction barriers for the growth of graphene armchair (AC) and zigzag (ZZ) edges were calculated as 3.00 and 1.94 eV, respectively; thus the ZZ edge grows faster than the AC one. Our theory successfully explained why the circumference of a graphene island grown on insulating substrates is generally dominated by AC edges, which is a long-standing puzzle of graphene growth. In addition, the very slow graphene growth rate on an insulating substrate is calculated and agrees well with existing experimental observations. The comprehensive insights on the graphene growth on insulating surfaces at the atomic scale provide guidance on the experimental design for high-quality graphene growth on insulating substrates.

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