Journal
ACS APPLIED MATERIALS & INTERFACES
Volume 13, Issue 16, Pages 18974-18983Publisher
AMER CHEMICAL SOC
DOI: 10.1021/acsami.0c21942
Keywords
inorganic resist; extreme ultraviolet lithography; organotin clusters; electron-beam lithography
Funding
- U.S. National Science Foundation [CHE-1606982]
- A Milton Harris Fellowship
Ask authors/readers for more resources
This study focuses on the impact of atmospheric gases on the dissolution rates of n-butyltin oxide hydroxide photoresists, revealing new phenomena such as the absorption of CO2 and reduction in carbon content. These findings may play a role in determining the patterning performance and variability based on changes in atmospheric gas composition.
Details of the chemistry enabling the patterning of organotin photoresists to single-digit-nm resolution continue to engage study. In this report, we examine the contributions of atmospheric gases to the differential dissolution rates of an n-butyltin oxide hydroxide photoresist. Cryo scanning tunneling electron microscopy (cryo-STEM) produces a micrograph of the latent image of an irradiated resist film, readily distinguishing exposed and unexposed regions. Temperature-programmed desorption mass spectrometry (TPD-MS) and cryo electron energy loss spectroscopy (cryo-EELS) show that irradiated films are depleted in carbon through desorption of butane and butene. Upon aging in air, irradiated films absorb H2O, as previously established. TPD-MS also reveals a previously unrecognized absorption of CO2, which correlates to a heightened dissolution contrast. This absorption may play an active role in determining intrinsic patterning performance and its variability based on changes in atmospheric-gas composition.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available