Diffraction Efficiency Characteristics for MEMS-Based Phase-Only Spatial Light Modulator with Nonlinear Phase Distribution

Micro-electro mechanical systems (MEMS)-based phase-only spatial light modulators (PLMs) have the potential to overcome the limited speed of liquid crystal on silicon (LCoS) spatial light modulators (SLMs) and operate at speeds faster than 10 kHz. This expands the practicality of PLMs to several applications, including communications, sensing, and high-speed displays. The complex structure and fabrication requirements for large, 2D MEMS arrays with vertical actuation have kept MEMS-based PLMs out of the market in favor of LCoS SLMs. Recently, Texas Instruments has adapted its existing DMD technology for fabricating MEMS-based PLMs. Here, we characterize the diffraction efficiency for one of these PLMs and examine the effect of a nonlinear distribution of addressable phase states across a range of wavelengths and illumination angles.

Automated summary

MEMS-based phase-only spatial light modulators (PLMs) have the potential to operate at speeds faster than 10 kHz, overcoming the limitations of liquid crystal on silicon (LCoS) spatial light modulators (SLMs) and expanding their practicality in various applications. However, the complex structure and vertical actuation requirements for large 2D MEMS arrays remain a challenge, but Texas Instruments has adapted their existing DMD technology for manufacturing MEMS-based PLMs.