Journal
MICROSYSTEMS & NANOENGINEERING
Volume 7, Issue 1, Pages -Publisher
SPRINGERNATURE
DOI: 10.1038/s41378-021-00239-0
Keywords
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Funding
- Southern University of Science and Technology
- Shenzhen Science and Technology Innovation Committee [JCYJ20200109105838951, JCYJ20170412154426330]
- Guangdong Natural Science Funds [2016A030306042, 2018A050506001]
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This paper introduces a spray-coating method to deposit electret layer with enhanced charge stability, proposes a second-order linear model to analyze charge decay process, and designs an electrostatic energy harvester with spray-coated electret, showing effective power generation in harsh environments.
The charge stability of electret materials can directly affect the performance of electret-based devices such as electrostatic energy harvesters. In this paper, a spray-coating method is developed to deposit an electret layer with enhanced charge stability. The long-term stability of a spray-coated electret is investigated for 500 days and shows more stable performance than a spin-coated layer. A second-order linear model that includes both the surface charge and space charge is proposed to analyze the charge decay process of electrets in harsh environments at a high temperature (120 degrees C) and high humidity (99% RH); this model provides better accuracy than the traditional deep-trap model. To further verify the stability of the spray-coated electret, an electrostatic energy harvester is designed and fabricated with MEMS (micro-electromechanical systems) technology. The electret material can work as both the bonding interface and electret layer during fabrication. A maximum output power of 11.72 mu W is harvested from a vibrating source at an acceleration of 28.5 m/s(2). When the energy harvester with the spray-coated electret is exposed to a harsh environment (100 degrees C and 98% RH), an adequate amount of power can still be harvested even after 34 h and 48 h, respectively.
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