Journal
JOURNAL OF OPTICS
Volume 23, Issue 2, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/2040-8986/abe35d
Keywords
ellipsometry and polarimetry; Mueller matrix; polarization; diffraction gratings
Categories
Funding
- National Key Research and Development Plan [2017YFF0204705]
- National Natural Science Foundation of China [51727809, 51525502]
- China Postdoctoral Science Foundation [2019M662601]
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Dielectric corrugated gratings have diverse applications, and Mueller matrix spectroscopic ellipsometry can be used to systematically study sinusoidal polydimethylsiloxane gratings, providing insight into the physical origins of optical behavior.
Dielectric corrugated gratings are of considerable interest due to their applications in acousto-optics, quantum electronics, integrated optics, spectroscopy, and holography integrated optics. Rigorous coupled-wave analysis has been widely used for the analysis of dielectric gratings. However, this approach is not only time-consuming and computer intensive but it also does not really promote the physical understanding of the origin of the observed optical behavior. Here, we use Mueller matrix (MM) spectroscopic ellipsometry to systematically study the sinusoidal polydimethylsiloxane grating. We correlate the observed polarization mixing in the Mueller matrix to the underlying physical origin using the physics-based approach. The calculated MM contour plots obtained from a biaxial Bruggemann effective medium approximation model are completed by the presence of Rayleigh-Woods anomalies. The roles of optical interference, geometric anisotropy, and diffraction orders are respectively identified by their different dispersion behavior, with their interactions and couplings highlighted. Such a straightforward procedure provides a new method for analyzing dielectric gratings, which requires considerably less computer power and is directly linked to the physical interpretations.
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