4.6 Article

Direct WS2 photodetector fabrication on a flexible substrate

Journal

VACUUM
Volume 184, Issue -, Pages -

Publisher

PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.vacuum.2020.109950

Keywords

WS2; Flexible photodetector; Sputtering; Electron-beam irradiation (EBI)

Funding

  1. Basic Science Research Program of the National Research Foundation of Korea (NRF) - Ministry of Science, ICT and Future Planning [2017R1D1A1B03032923]
  2. National Research Foundation of Korea [2017R1D1A1B03032923] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)

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Researchers have successfully fabricated flexible photodetectors based on tungsten disulfide, which showed significantly improved photoresponsivity at different laser illumination wavelengths after electron beam irradiation treatment, along with reduced rise and fall times by 1-2 orders of magnitude. Mechanical durability of the photodetector was confirmed through static and cyclic bending tests, demonstrating only a small loss in performance (>10%) after continuous bending.
Recently, research to find novel two-dimensional (2D)-layered materials has attracted attention due to their advantages in flexible device applications. Thus, we directly fabricated photodetectors based on tungsten disulfide (WS2) on a flexible substrate using radio frequency (RF) magnetron sputtering and electron beam irradiation (EBI). The photoresponsivity of the WS2 photodetectors at laser illumination wavelengths of 450, 532, and 635 nm increased by 1506, 1677, and 1710 times, respectively, after EBI treatment. Furthermore, the rise and fall times decreased by 1-2 orders of magnitude after EBI treatment. The mechanical durability of the flexible WS2-based photodetectors was confirmed using static and cyclic bending testing, showing a small loss in performance (>10%) after continued bending.

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