4.4 Article

Fabrication of Ge-ZnS multilayered optical filters for mid-infrared applications

Journal

THIN SOLID FILMS
Volume 719, Issue -, Pages -

Publisher

ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2020.138488

Keywords

Broadband antireflection coating; Dichroic filter; Ion-assisted deposition; Electron beam evaporation; Germanium; Zinc sulphide

Funding

  1. ANRT (Association Nationale Recherche Technologie) through a CIFRE grant [2015/1042]
  2. CPER Sophie

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Germanium/Zinc Sulphide (Ge/ZnS) single and multilayers were deposited on Silicon substrates using ion assisted electron beam deposition for applications in the 2-15 μm wavelength region. Refractive indices of Ge and ZnS films were determined from measured reflectance and transmittance spectra. Mid-infrared filters with designs ranging from 3 to 29 layers, including high-, anti-reflection coatings and dichroic filters, were successfully fabricated, with experimental spectra showing good agreement with simulations, particularly in the long-wave infrared region.
Germanium/Zinc Sulphide (Ge/ZnS) single and multilayers are deposited by ion assisted electron beam deposition on Silicon substrates for applications in the 2-15 mu m wavelength region. Refractive indices of Ge and ZnS thin films are extracted from measured reflectance and transmittance spectra. Several types of mid-infrared filters (high-, anti-reflection coatings and dichroic filters) with a number of layers ranging from 3 to 29 are then designed and deposited. The optical responses of fabricated mid-infrared filters show a good agreement between experimental spectra and simulation in the case of highand anti-reflection coatings in the long-wave infrared but also for dichroic filters with a low transmittance in the mid-wave infrared and broadband bandpass in the long-wave infrared.

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