Related references
Note: Only part of the references are listed.New strategies for conformal, superconformal, and ultrasmooth films by low temperature chemical vapor deposition
John R. Abelson et al.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A (2020)
A comprehensive review of micro-distillation methods
Ruey-Jen Yang et al.
CHEMICAL ENGINEERING JOURNAL (2017)
A brief review of atomic layer deposition: from fundamentals to applications
Richard W. Johnson et al.
MATERIALS TODAY (2014)
Atomic Layer Deposition: An Overview
Steven M. George
CHEMICAL REVIEWS (2010)
A useful system for microscale and semi-microscale fractional distillation of air-sensitive substances with high boiling points
JA Gutiérrez
JOURNAL OF CHEMICAL EDUCATION (2001)