Journal
OPTICS COMMUNICATIONS
Volume 482, Issue -, Pages -Publisher
ELSEVIER
DOI: 10.1016/j.optcom.2020.126589
Keywords
Metal; glass nanocomposite array; Metal ion implantation; Electron beam lithography; Ion beam etching; Diffractive property
Categories
Funding
- National Natural Science Foundation of China [11675120, 11535008]
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The method of etching the metal-ion-implanted dielectric via a patterned electron beam (EB) resist mask was used to fabricate metal/glass nanocomposite arrays with improved diffractive performance. The diffraction efficiency of the Au/SiO2 nanocomposite array was influenced by the distribution depth and volume fraction of nanocomposites, which could be significantly improved by optimizing the parameters of the Au/SiO2 nanocomposite.
In this work, the method of etching the metal-ion-implanted dielectric via a patterned electron beam (EB) resist mask was used to fabricate the metal/glass nanocomposite arrays with prospective applications. Following the method, the Au/SiO2 nanocomposite arrays with an expected square grid of 600 nm periodicity (50% in the duty cycle) were fabricated. Experimental results revealed that the fabricated arrays presented a better diffractive performance compared with the unimplanted silica glass array. Subsequently, the diffraction characteristics of the corresponding one-dimensional Au/SiO2 nanocomposite arrays were numerically simulated. The calculated results showed that the diffraction efficiency of the Au/SiO2 nanocomposite array was influenced by the distribution depth and volume fraction of nanocomposites, which could be improved significantly by optimizing the parameters of the Au/SiO2 nanocomposite.
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