Journal
OPTICS AND LASER TECHNOLOGY
Volume 135, Issue -, Pages -Publisher
ELSEVIER SCI LTD
DOI: 10.1016/j.optlastec.2020.106687
Keywords
Femtosecond laser processing; Parallel processing; Microlens array; Micro/nano grating; Photon crystal; Optical fiber
Categories
Funding
- National Natural Science Foundation of China [61727811, 61973298, 61803366, 61821005]
- External Cooperation Program of Chinese Academy of Sciences [173321KYSB20170015]
- Interdisciplinary Innovation Team of Chinese Academy of Sciences [JCTD-2019-09]
- Liaoning Revitalization Talents Program [XLYC1807006]
- Youth Innovation Promotion Association of the Chinese Academy of Sciences [Y201943]
- Fundamental Research Funds for the Central Universities [D2017020]
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Femtosecond laser fabrication offers unique advantages for manufacturing optical and photonic devices based on complex 3D structures, with versatile applications in various fields. This review highlights recent advancements in femtosecond laser fabrication technologies and their applications, as well as methods and applications for manufacturing cutting-edge optical devices.
The unique advantages of surface and volume processing enabled by femtosecond laser fabrication makes it one of the most powerful tools for manufacturing optical and photonic devices based on complex three-dimensional structures with diverse functions. In this review, we focus on the recent advancements of femtosecond laser fabrication technologies and their versatile applications in different fields (e.g., nanotechnology, soft robotics, optics, and optoelectronics). Herein, the characteristics and development of laser direct writing, spatial light modulator-based fabrication and interference-based approaches are reviewed. Furthermore, typical applications and approaches related to the manufacturing of cutting-edge optical devices including microlens arrays, micro/ nano gratings, photonic crystals, and optical fibers are summarized. Finally, the current challenges and emerging trends of this technology are discussed.
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