Journal
MICROSCOPY AND MICROANALYSIS
Volume 27, Issue 2, Pages 237-249Publisher
CAMBRIDGE UNIV PRESS
DOI: 10.1017/S1431927621000027
Keywords
orientation mapping; precession electron diffraction; scanning electron microscopy; transmission electron microscopy; transmission Kikuchi diffraction
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Funding
- Samsung Electronics Company
- Max Planck Society
- National Research Foundation of Korea (NRF) - Korea government (MIST) [NRF-2020R1A2C2101735]
- Ministry of Trade, Industry and Energy (MOTIE, Korea) [NRF-2019M3D1A1078296, NRF-2018M3C1B7021994, 10080654]
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This study evaluates two advanced, automated crystal orientation mapping techniques suitable for nanocrystalline materials. The comparison shows that TEM-PED is more reliable for characterizing grains oriented along low-index zone axes, while SEM-TKD is better at detecting small misorientation between grains, providing better quantification and statistical analysis of grain orientation. Both techniques are complementary tools for nanocrystalline materials and can be selected based on analysis requirements, as they have competitive performance in terms of angular resolution and texture quantification.
Two advanced, automated crystal orientation mapping techniques suited for nanocrystalline materials-precession electron diffraction (PED) in transmission electron microscopy (TEM) and on-axis transmission Kikuchi diffraction (TKD) in scanning electron microscopy (SEM)-are evaluated by comparing the orientation maps obtained from the identical location on a 30 nm-thick nanocrystalline tungsten (W) thin film. A side-by-side comparison of the orientation maps directly showed that the large-scale orientation features are almost identical. However, there are differences in the fine details, which arise from the fundamentally different nature of the spot pattern and Kikuchi line pattern in terms of the excitation volume and the angular resolution. While TEM-PED is more reliable to characterize grains oriented along low-index zone axes, the high angular resolution of SEM-TKD allows the detection of small misorientation between grains and thus yields better quantification and statistical analysis of grain orientation. Given that both TEM-PED and SEM-TKD orientation mapping techniques are complementary tools for nanocrystalline materials, one can be favorably selected depending on the requirements of the analysis, as they have competitive performance in terms of angular resolution and texture quantification.
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