4.7 Article

Design, modelling and characterization of comb drive MEMS gap-changeable differential capacitive accelerometer

Related references

Note: Only part of the references are listed.
Article Engineering, Electrical & Electronic

Quarter-mm2 High Dynamic Range Silicon Capacitive Accelerometer With a 3D Process

Federico Maspero et al.

IEEE SENSORS JOURNAL (2020)

Article Engineering, Multidisciplinary

Development and Validation of Wearable Inertial Sensor System for Postural Sway Analysis

Michael Pollind et al.

MEASUREMENT (2020)

Review Chemistry, Analytical

A Review of the Capacitive MEMS for Seismology

Antonino D'Alessandro et al.

SENSORS (2019)

Article Engineering, Electrical & Electronic

Design and optimization of fully differential capacitive MEMS accelerometer based on surface micromachining

Mansour Keshavarzi et al.

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS (2019)

Article Engineering, Electrical & Electronic

Design, modelling and system level simulations of DRIE-based MEMS differential capacitive accelerometer

R. Mukhiya et al.

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS (2019)

Article Automation & Control Systems

An optimization technique for performance improvement of gap-changeable MEMS accelerometers

Zakriya Mohammed et al.

MECHATRONICS (2018)

Article Engineering, Electrical & Electronic

A double differential torsional micro-accelerometer based on V-shape beam

Dingbang Xiao et al.

SENSORS AND ACTUATORS A-PHYSICAL (2017)

Article Engineering, Multidisciplinary

Design and Analysis of MEMS Comb Drive Capacitive Accelerometer for SHM and Seismic Applications

S. Kavitha et al.

MEASUREMENT (2016)

Review Engineering, Electrical & Electronic

Optimization of MEMS capacitive accelerometer

Mourad Benmessaoud et al.

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS (2013)

Proceedings Paper Engineering, Electrical & Electronic

SiGe MEMS Accelerometers Combining a Large Bandwidth with a High Capacitive Sensitivity

A. Ray Chaudhuri et al.

26TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS, EUROSENSOR 2012 (2012)